擦靶 的英文怎麼說
中文拼音 [cābǎ]
擦靶
英文
dust a target-
Moreover, it was found that the microstructure and physical properties of dlc film were affected to some extent by the distance between target and substrate. when the distance between target and substrate increases, sp 3c content in the deposited dlc film decreases. accordingly, the value of surface roughness, microhardness, friction coefficient, residual stress and band gap became lower in the same way
此外，靶基距對dlc薄膜的結構和性能也有一定的影響，隨著靶基距增加， dlc薄膜中的sp ~ 3c含量減少， dlc薄膜的表面粗糙度降低，顯微硬度降低，摩擦系數減小，殘余應力減小，光學帶隙eg減小。
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