斜度刻蝕 的英文怎麼說
中文拼音 [xiédùkèshí]
斜度刻蝕
英文
slope etching-
A driving signal with a dc bias voltage and ac voltage is usually necessary for sensing very small capacitance. the reliable operation conditions of the capacitive sensor for foreign acceleration had been researched with the assumption of the parallel comb plates. but the comb plates are actually not parallel for the reason of the drie process
前人在研究外界加速度信號對傳感器的作用時,假定驅動信號產生的靜電力作用在平行梳齒電容極板上,但是,在用drie工藝對硅進行刻蝕時會產生側蝕效應,從而得到的梳齒電容有一定的傾斜角度。
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