梯形棱鏡 的英文怎麼說
中文拼音 [tīxíngléngjìng]
梯形棱鏡
英文
dove prism-
An interferometric lithographic experimental system with maskless and multi - beam exposure is built. an experimental system with wavefront divided by a trapezoidal prism and with selectable diaphragms for kinds of multi - beam, multiple - exposure interferometric lithography research is proposed. the experimental study on interferometric lithography is carried out
建立了無掩模多光束多曝光干涉光刻實驗系統,提出了一種採用梯形棱鏡進行波前分割和利用可選擇光闌進行多種多光束多曝光干涉光刻研究的實驗系統,進行了干涉光刻實驗研究,對模擬和實驗結果進行了分析。
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