正性膠光刻 的英文怎麼說

中文拼音 [zhēngxìngjiāoguāng]
正性膠光刻 英文
positive resist lithography
  • : 正名詞(正月) the first month of the lunar year; the first moon
  • : Ⅰ名詞1 (性格) nature; character; disposition 2 (性能; 性質) property; quality 3 (性別) sex ...
  • : Ⅰ名詞1 (某些具有黏性的物質) glue; gum 2 (橡膠) rubber 3 (姓氏) a surname Ⅱ動詞(用膠粘) st...
  • : Ⅰ名詞1 (照耀在物體上、使人能看見物體的一種物質) light; ray 2 (景物) scenery 3 (光彩; 榮譽) ...
  1. Photoresist technology is the important constitute of exposure technology, high performance resolution can be attained by using high performance exposure tools with matched high performance photoresist

    摘要技術是曝技術中重要的組成部分,高能的曝工具需要有與之相配套的高能的才能真獲得高解析度的加工能力。
  2. Intensity distribution in photoresist is analyzed during ldw exposure process in terms of the improved theoretical model and the method of selecting the optimal exposure is described. results of ray - tracing using zemax that is optical design software agree well with the calculated results of theoretical model and l dw experimental results verify the accuracy of the model. therefore this improved model is important significant for directing ldw research

    本文完善了激直寫理論,分析了直寫曝層內場的分佈,探討了最佳曝量的選擇方案,利用zemax軟體進行線追跡的結果和理論模擬十分相近,實驗結果驗證了理論模型的,該理論模型對激直寫技術研究具有重要指導意義。
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