細線光刻 的英文怎麼說
中文拼音 [xìxiànguāngkè]
細線光刻
英文
fine line lithography-
The gravity analysis is carried out especially for the synthetic fused silica and calcium fluoride used in 193nm lithographic objective as well as the optical elements with structural sizes of ( 200mm ~ ( 300mm. large numbers of analysis data for surface shape error are obtained by using algor finite element analysis software. then these data are plotted into curves and comparison analysis will be carried out, finally the measures and schemes for reducing gravity deformation are proposed
因此，本論文重點對大口徑光學系統在高精度光學鏡頭裝校中，因重力變形進行了詳細的分析研究，特別針對193nm光刻物鏡系統所使用的材料sytheticfusedsilica和caleiumfluoride以及用到的結構尺寸200mm ~ 300mm光學零件進行了重力變形分析，使用algor有限元分析軟體獲得了大量的面形誤差分析數據，然後將這些數據繪成曲線進行對比分析，最後提出了減小重力變形的措施與方案，並進行了實驗，驗證了分析結果是正確的，減小重力變形的方法是有效的。The basics of lithography process, as well as the basic structure of lithographic system and the basic theory of partially coherent imaging are introduced in this paper. a bi - linear model of optical imaging is also presented. based on these theories, the simulation process of csplat is particularly analyzed, especially the computation of tccs ( transmission cross coefficient ) under different illuminations and the processing of primary lens aberrations inside tcc computation process
本文從光刻基本過程入手，介紹了光刻機光學系統的基本組成、部分相干光透射成像的基本原理，提出了光學系統的雙線性模型，並在此基礎上詳細分析了模擬軟體splat的模擬過程，其中著重分析了光學系統的傳輸交叉系數tcc的計算，包括不同照明系統下tcc的計算以及tcc計算中像差的處理。Jinlong stone arts factory was set up in 1993, covering an arer of 2, 000 square meters, which is a private enter prise engage in processing stone crafts. the factory has advanced stone processing machine in producing arc slabs, columu head, coumn base, ro man column, stone border, stone patterning with water cutting kinfe, fountain ball and st one carving. by using the multi - function column making machine and infrared stone border profiling machine, the factoey can produce high quality products with perfect skills, including column, aperture linking of stone border, angle, arc angle, polish limit etc
金龍工藝廠創辦於1993年，廠房佔地面積2000多平方米，是一家從事石材工藝加工的企業，擁有加工圓弧板、柱頭、柱座、羅馬柱、石線、水刀藝術拼花、風水球、雕刻等先進的石材機械，採用多功能圓柱刨柱機，紅外線石線仿型機，以精細的石材加工工藝使圓柱、石線的拼逢、角度、圓弧度、光澤度等在加工質量有突破性飛躍。Mems technology is a hot topic of science and industry in the 21st century, and micro - fabrication technologies are the key to the mems development. in the mems field, microstructure with high height and high aspect ratio is often used. liga ( x - ray lithography 、 electroforming 、 micro - replication ) technology are the very way to fabricate this microstructures
在mems領域中，常需要用到具有一定厚度和深寬比的微結構， liga （ x射線深層光刻、電鑄成型和微復制）技術是製作這種微結構的重要手段，因此成為mems微細加工中十分重要的技術。The principle products include project of complete glazing line, accessory machineries for press / dryer / kiln, deep - processing machine ( e. g. polishing machine for glazed ceramic, newest fully automatic gashing machine, high speed miller machine ), silicon cylinder engraving service and ceramic designs offer etc, which of market share is ahead of those working for similar industries and sold out to south - east asia, mid - east, south - america and africa
公司主要產品包括：印花機、釉線及釉線上配套產品、全自動仿古磚拋釉機、新型劃磚（界磚）機、高速超細研磨機、輥筒機輥筒激光雕刻及圖案設計等，其產品市場佔有率均列同行之首，並銷往東南亞、中東、南美洲、非洲等地。分享友人