耐熱掩模 的英文怎麼說
中文拼音 [nàirèyǎnmó]
耐熱掩模
英文
refractory mask-
Lithograghy and its relative techniques play a very important role in mems fabrication processes, spin coating and baking are an indispensable working procedure before and after the lithography process. oven and hotplate are often employed in order to enhance adhesion between the film and the substrate, stabilize sensitivity of film and improve the abrasion resistance when the film touches a mask in contact exposure
均膠和烘乾是光刻工藝中不可缺少的一道工序，為增加膠層與矽片表面粘附能力，提高在接觸式曝光中膠層與掩模版接觸時的耐磨性能及穩定膠層的感光靈敏度，通常採用烘箱或熱板等加熱設備對光刻膠進行乾燥。
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