腐蝕掩膜 的英文怎麼說
中文拼音 [fǔshíyǎnmó]
腐蝕掩膜
英文
etching mask- 腐 : Ⅰ名詞(豆腐) bean curdⅡ動詞(腐爛; 變壞) decay Ⅲ形容詞(腐爛) rotten; corroded; putrid
- 蝕 : Ⅰ動詞1. (損失; 虧耗) lose 2. (腐蝕) erode; corrode Ⅱ名詞(天體現象) eclipse
- 掩 : 動詞1 (遮蓋; 掩蔽) cover; hide 2 (關; 合) shut; close 3 [方言] (被卡住) get squeezed [pinch...
- 膜 : 名詞1. [生物學] (像薄皮的組織) membrane 2. (像膜的薄皮) film; thin coating
- 腐蝕 : 1 (通過化學作用使物體逐漸消損破壞) corrode; corrosion; corroding; deep etch; diabrosis; rot; ea...
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Apropos of micromanufacturing technologies of silicon - based mems correlative to tini sma, patterning of tini thin film is one of the key processes, in order to photoetch thicker tini films ( more than 10
同時, pt掩膜在hfno3 ho腐蝕系統中具有抗腐蝕力強、不脫落的特點,是腐蝕較厚tei膜( 5nm )的理想掩膜材料。P - type silicon crystal plates have been adopted in the text, which are formed mask sio2 by heat - oxygenation. and figures are diverted by normal light etching technology
本文採用p型單晶矽片,由熱氧化形成sio _ 2掩膜層,標準光刻工藝進行圖形轉移,用koh溶液濕法刻蝕製作倒四棱錐腐蝕坑列陣。The purpose of this thesis is to develop the laser assisted wet chemical etching on the gaas substrate. the main contents and contributions include : 1 ) laser - assisted wet mask - etching method and poles - etching method have been proposed laser - assisted wet mask - etching method is that the area which need not etched is covered by mask film, and the uncovered area is processed by laser induced wet etching
本文的工作就是圍繞半導體gaas基片的激光化學誘導液相腐蝕技術開展的,主要的研究結果和創新之處如下: 1 )提出了激光誘導液相抗蝕膜掩蔽法和電極腐蝕法抗蝕膜掩蔽法是指在基片表面不需要腐蝕的區域用抗蝕膜覆蓋,激光照射在無抗蝕膜區域,對基片進行腐蝕。In order to make integration of theory with practice, a lot of experiments have been done. mask - making technology, photoetching and wet - etching processes have been optimized. the author also presents the application and commercial value of silicon v - groove arrays
在實踐上,對製作工藝積極探索,提出新的制備硅掩蔽膜的工藝方案,對影響光刻質量的因素深入分析,試驗摸索出適用於v型槽的各向異性濕法腐蝕的腐蝕液配方,獨立優化設計了製作硅v型槽的相關工藝,製作出高質量的硅v型槽。The work mainly consists of four parts : the first part is to use oxidation and lpcvd technique to produce sio2 mask film and si3n4 insulation film in order to enhance the heating efficiency of micro chamber, and guarantee the carry out of the reaction. the second part is to use the combination of dry etching and wet etching to produce reaction micro chamber, it is the container which carry out the pcr reaction, and dna sample carry out amplification reaction here. the third part is to use the sputtering, photolithography to produce heaters and temperature sensors which heat the reaction micro chamber and provide the temperature condition for the pcr reaction
首先,利用氧化工藝和lpcvd技術,生長sio _ 2掩膜層和si _ 3n _ 4絕緣層,以提高反應腔的熱效率,保證擴增反應的順利進行;其次,用濕法腐蝕和干法刻蝕相結合的方法加工微型腔體,使之作為dna樣品進行pcr擴增反應的容器;第三,用濺射、光刻等工藝在微型腔體底部製作微型加熱器和溫度傳感器,實現對反應腔體的加熱及其溫度的精確測量,提供pcr擴增反應所需的溫度條件。On the base of these analyses, optimization design and arts design are performed and the layouts of masks are plotted. the theory model of this kind of acceleration sensor is founded to guide the fabrication
在此基礎上進行了結構優化設計和工藝設計,研究了錐尖成形工藝和「多掩膜無掩膜」腐蝕工藝,根據工藝流程繪制出光刻掩膜版圖,為該傳感器的研製奠定了一定的基礎。分享友人