aperture correction 中文意思是什麼
aperture correction
解釋
孔經校正- aperture : n. 1. 孔，隙縫。2. （照相機的）光圈；孔徑，口徑。
- correction : n 修正，改正；校正；矯正；〈古語〉懲罰；勘誤表，補正。 a copy disfigured by numerous corrections ...
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Before more advanced lithography tool is produced, in order to use current tools to manufacture vdsm ic, reticle correction methods such as perturbing the shape ( via optical proximity correction ( opc ) ) or the phase ( via phase - shifting masks ( psm ) ) of transmitting aperture in the reticle are proposed by the industry
在波長更小的光刻系統出現前，為了能利用現有設備解決集成電路的可製造性問題，工業界提出了對掩模作預失真（光學鄰近校正）和在掩模上加相位轉移模（移相掩模）等的掩模校正方法。 -
In this paper a two - step polishing process which combined with whole aperture pre - polishing with large flexible form tools and correction polishing with small - tools is proposed to polish aspheric surface with middle aperture and replace the reiteration polishing processes
論文針對中等口徑光學非球面，提出了一種結合彈性模全口徑拋光和小工具修正拋光的兩步研拋法，取代目前普遍使用的反復研拋過程。
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