deep etch 中文意思是什麼
deep etch
解釋
平凹板-
Deep etch test
深腐蝕試驗 -
Kionix manufactures inertial sensors using plasma micromachining, a highly - refined, proprietary, deep reactive ion etch drie fabrication technology. the resulting products are ultra - small mechanical elements integrated with electronics to create microelectromechanical systems mems
Kionix的慣性sensor採用的plasma微機電製程,是一種經高度改良且有獨家專利製程,使產品的機械結構部份做到最小並同時與電子電路結合形成一先進的微機電產品
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