electro beam machining 中文意思是什麼
electro beam machining
解釋
電子束加工-
The silicon micro - machining technology is used to fabricate the bi - layered silicon microcantilever resonators, the excitation of silicon micro - resonators is achieved using electro - thermal method via fabricating thermal excitation resistance on the silicon microcantilever beam
利用硅微機械加工工藝製作了雙層結構硅微懸臂梁諧振器,通過在硅微懸臂樑上製作的熱激勵電阻,用電熱方法對硅微諧振器實現了激振。
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