etch rates 中文意思是什麼
etch rates
解釋
浸蝕速度-
Testing of materials for semiconductor technology ; determination of etch rates of etching mixtures ; silicium - dioxid coating ; optical method
半導體工藝材料的檢驗.蝕刻混合劑浸蝕率的測定.第2部 -
Testing of materials for semiconductor technology ; determination of etch rates of etching mixtures ; silicium monocrystals ; gravimetric method
半導體工藝材料的檢驗.蝕刻混合劑浸蝕率的測定.第1部 -
Testing of materials for semiconductor technology - determination of etch rates of etching mixtures - part 3 : aluminium, gravimetric method
半導體技術試驗.蝕刻混合劑浸蝕率測定.第3部分:鋁.測 -
The results show that amorphous carbon films have high etching resistance against oxygen plasma, and etch rates of the films correlated not only with etching processing parameters, also with deposition conditions
結果表明非晶碳膜對于氧離子體具有高的抗刻蝕性,其刻蝕率不僅與刻蝕的過程參量有關,而且決定於膜的沉積條件。
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