glow discharge source 中文意思是什麼
glow discharge source
解釋
輝光放電源-
So we applied low temperature techniques to manufacture the sense film of qcm sensors. at low temperature and low pressure, with n - butylamine as the carbon source material, and with dry hydrogen as the carrying gas, we applied r. f. glow discharge plasma to preparation the working film for the qcm sensors
在「實驗與分析」一章中較為詳細地闡述了採用等離子體化學氣相淀積的方法,以正丁胺作為碳源物質,通過射頻輝光放電在低溫低壓條件下制得了正丁胺等離子體淀積膜。 -
Through optimization of excitation parameters of the glow - discharge source and calculation of the sputtering rate of the certified reference materials, a method for the quantitative surface analysis of nc - si : h film was established
方法應用於實際摻雜納米硅薄膜樣品的分析,並將分析深度、剖析結果與表面形貌儀的結果進行了對照。
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