ion contamination 中文意思是什麼
ion contamination
解釋
離子污染- ion : n. 【物理學】離子。 positive [negative] ion正[負]離子。
- contamination : n. 污染；污穢，污物；（語言的）交感，感染錯合；（文章，故事等的）混合，拼湊。 ideological contamination精神污染。
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Particle contamination and system reformation in end station of ion implanter
離子注入機靶室塵埃污染與系統改造 -
Some previous experiments have showed that cavities had more efficient gettering than p - diffusion, mechanical damage and ion implantation. most of studies about cavities gettering are concentrated on the peculiarity of cavities gettering metal impurities intentionally into silicon wafer from the viewpoint of basic study. this technique especially applied to low - contamination process, how ever, has not been carefully studied, which should be important to the semiconductor manufacturing
而過去的工作多集中在從基礎研究的角度研究氦微孔對有意摻入金屬雜質的矽片的吸除特性，對無意引入的低濃度金屬雜質的器件吸雜效果的研究卻非常少，這方面的研究是氦微孔技術走向實際應用的必經之路。
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