ion enhanced etching中文意思是什麼

ion enhanced etching解釋
離子增強腐蝕

  • ion: n. 【物理學】離子。 positive [negative] ion正[負]離子。
  • enhanced: 提高了的
  • etching: n. 1. 蝕刻法;蝕刻(銅)版畫;蝕鏤術。2. 蝕刻畫,蝕刻版,蝕刻版印刷品。

※英文詞彙ion enhanced etching在字典百科英英字典中的解釋。

  1. Yak hairs were treated by the microwave electron cyclotron resonance plasma reactive ion etching ( ecr - rie ) equipment to improve its property of weave

    摘要採用微波電子迴旋共振等離子體反應離子刻蝕( ecr - rie )裝置對氂牛毛纖維進行表面改性,從而改善氂牛毛的可紡性。
  2. In this investigation, gas barrier property of pet has been improved by plasma enhanced chemical vapor deposition ( pecvd ) and plasma immersion ion implantation ( piii ) technologies

    本文通過等離子體化學氣相沉積( pecvd )和等離體浸沒離子注入( piii )技術在聚酯材料表面制備了阻隔碳膜來提高氣體阻隔性能。
  3. The feasibility that kaufman ion source is applied in reactive ion beam etching is discussed. etching characteristics of materials, including pr, cr, quartz, are investigated. the etch rate and mechanisms of such materials are measured and analyzed as a function of ion energy, ion beam density and ion incidence angle in pure ar and chf3, respectively. the etch rate has shown a square root dependence on variation versus

    深入研究了光刻膠、鉻薄膜、石英等光學材料離子束刻蝕特性,分別以ar氣和chf3為工作氣體,研究光刻膠、鉻薄膜、石英等的刻蝕速率隨離子能量,束流密度和離子入射角度的變化關系,得到刻蝕速率與影響因素的擬合方程,為掩模的製作工藝路線提供了實驗依據和理論指導。
  4. Reactive ion beam etching system ribe system

    反應性離子束蝕刻系統
  5. Lin h, li l and zeng l., " in - situ monitoring during ion - beam etching of multilayer dielectric gratings : simulation and experiment ", holography, diffractive optics, and applications ii, spie, 5636, 143 ( 2004 )

    林華,李立峰,曾理江, "利用導波耦合角度實時控制光刻膠光柵掩模的占寬比" ,光學學報, 26 , 767 ? 772 ( 2006 )
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