ion gas laser 中文意思是什麼
ion gas laser
解釋
離子氣體激光器-
Compared with the conventional chemical etching, laser assisted wet chemical etching can eliminate the effect of crystal orientation efficiently and fabricate more diversified etched pattern ; compared with the laser assisted gas chemical etching, the required condition for laser wet etching can be realized more easily and the operation can be simplified ; compared with the ion etching, it has advantages of no ion damage to substrate, avoiding over - etching and cost - effective
半導體的激光誘導液相腐蝕與普通化學腐蝕相比,可以有效地消除晶體取向影響,製作出更加多樣化的腐蝕圖形;與激光誘導氣相腐蝕相比,其工藝條件更加容易實現,操作更加簡單;與干法離子刻蝕相比,對基片無離子損傷,過度腐蝕容易控制,成本低。
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