isolated substrate 中文意思是什麼
isolated substrate
解釋
絕緣襯底-
The annealing also changes the grain morphology. the p grains from the amorphous layer are finer than in the other cases. silicide grains grow towards the substrate at high annealing temperature and finally shrink into isolated islands, thus deteriorating the silicide / si interface smoothness
由於非晶的形成,使得退火后晶粒要經重新形核和長大的過程,所以在同樣的退火條件下,與未形成非晶的樣品比,硅化物顆粒要小。
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