laser levitation 中文意思是什麼
laser levitation
解釋
激光懸浮- laser : n 鐳射激光，受激發射光，激光；萊塞；激光器，光激射器 （ ＝ light amplification by stimulated emis...
- levitation : 反重力
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This paper with the actual needs of metal physical doping of icf target material and laser - x - ray conversion material is starting point, major for flow - levitation method principle, technology parameter control particle grain size, structure and thermal stability of phase composition that prep aration metal and alloy nanoparticle go deep into research. the principle of preparation metal nanoparticle by flow - levitation method is difference with other evaporate condensation method
本文以icf靶材料金屬物理摻雜和激光- x光轉換材料的實際需要為出發點，主要對自懸浮定向流技術制備金屬與合金納米微粒的原理、過程和工藝參數控制微粒粒徑大小，所制備納米微粒的結構、物相組成以及組成相的熱穩定性等方面進行了深入研究。 -
In this paper, the development trend of micro - electronics equipment, the progress situation of precision work stage for laser photolithography equipment and the research and evolution of magnetic levitation technology in china and other countries are discussed generally. the main function, the demand of technical index and key technology of laser photolithography work stage are introduced simply. the magnetic levitation technology and the work principle of linear motor are stated, and the design and analysis method of mechatronics cad / cae for magnetic levitation precision stage is presented
本文綜述了微電子製造設備發展趨勢及其精密工作臺如光刻機工作臺的國內外發展現狀及磁懸浮技術研究進展，簡要介紹了光刻機工作臺主要功能、技術指標要求、組成及關鍵技術，概述了磁懸浮技術及直線電機驅動的工作原理，著重研究用機電一體化cad cae集成技術設計、分析磁懸浮精密定位工作臺的方法，闡明了應用cad cae技術研製磁懸浮精密定位工作臺的現實意義。 -
The development status and trend of micro - electronics in china and others countries and the important influence of micro - electronics in the increase of world economy are discussed generally in this paper, and the research and development of laser lithography technology and equipment are summarized. the realistic significance, importance and feasibility of researching a new style of magnetic levitation ( maglev ) precision stage are narrated
論文系統地綜述了國內外微電子技術的發展概況、發展趨勢以及微電子產業在世界經濟增長中具有的重大影響，概述了光刻技術和光刻設備的研究與發展狀況，敘述了當前磁懸浮技術的研究及應用水平，闡明了研製新型磁懸浮精密定位平臺的現實意義、重要性和可行性。 -
Combining magnetic levitation technology and linear motor drive technology, applying cad / cae method, a new magnetic levitation precise stage is designed and researched, which is step and precise position mechanism in 1c chip manufacture equipment of micro - electronics trade such as laser photolithography equipment. it is an innovative research
將磁懸浮技術和直線驅動技術相結合，採用cad cae技術手段設計研究了一種新型磁懸浮精密定位工作臺，它是針對微電子行業ic晶元製造設備如光刻機而研製的快速步進、精密定位機構，是創新性研究。
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