line spread function 中文意思是什麼
line spread function
解釋
線分佈函數-
Abstract : a new method for determining proximity parameters, and in electron - beam lithography is introduced on the assumption that the point exposure spread function is composed of two gaussians. a single line is used as test pattern to determine proximity effect parameters and the normalization approach is adopted in experimental data transaction in order to eliminate the need of measuring exposure clearing dose of the resist. furthermore, the parameters acquired by this method are successfully used for proximity effect correction in electron - beam lithography on the same experimental conditions
文摘:在電子散射能量沉積為雙高斯分佈的前提下，提出了一種提取電子束光刻中電子散射參數，和的新方法.該方法使用單線條作為測試圖形.為了避免測定光刻膠的顯影閾值，在實驗數據處理中使用歸一化方法.此外，用此方法提取的電子散射參數被成功地用於相同實驗條件下的電子束臨近效應校正 -
Line spread function
線擴散函數 -
On the basis of increasing the flaw resolution of the x - ray radiographic system, the study is firstly concerned with the analysis made on the influence of such factors as redial sources energy, system noise, optics radiography and scattering on the radiographic system in theory, and the present dissertation looks at the methods for acquiring the radiographic system point sp read function, line spread function and module transfer function ( mtf ). on the basis of these studies, research the spread properties of the tiny flaw making use of mtf, acquiring the properties of system inspecting sensitivity and resolution, based on the system optimization designing
本文以提高射線成像系統的疵病解析度為前提，首先在理論上對射線源能量、系統噪聲、光學成像、散射等各環節對成像系統的影響進行分析，探討成像系統的點擴展函數、線擴展函數及其調制傳遞函數（ moduletransferfunction ，簡稱mtf ）獲取方法，在此基礎上，利用mtf研究微小疵病的擴展特點，從而得到系統的檢測靈敏度和解析度給出關系特性，為系統優化設計提供依據。 -
In the light of the weakness of the traditional method, this thesis improves the point spread function ( psf ) of the imaging system. meanwhile, this thesis adds line process as a priori to set up several convex constraint sets
針對傳統凸集投影估計法的缺點，本文提出了改進的點擴散函數，同時利用圖像的先驗知識，提出了加入線過程作為凸約束。
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