mems 中文意思是什麼

mems 解釋
被廣泛應用在微型泵
  1. In all kinds of switches, thermo - optical switch, mems switch, liquid - crystal switch and air bladder switch are the trend of large - scale switch array, and lithium niobate electro - optical switches and electro - optical polymer switches are the trend of fast switches

    在各種光開關中，熱光開關列陣、微機械光開關列陣、液晶光開關以及氣泡式光開關列陣由於集成度較大，因而將是大規模陣列光開關的發展方向。
  2. Mems ( micro electromechanical system ) has become one of the most rapidly development technologies. along with the rapid development of mems techniques, capacitive sensor is used widely whose capacitance changes small, which has put forward the new request to the measurement technique. the common measure for capacitance measurement is that convert capacitance to voltage, electric current or frequency. the area of polar plate of the capacitor becomes smaller and smaller, and the total capacitance of micro capacitive sensor is usually several pico farad only. as a result, its change amount is smaller

    Mems （ microelectromechanicalsystem ）近年來發展最快的技術之一，隨著mems技術的快速發展，電容式加速度計的電容變化變化量越來越小，對檢測技術提出了新的要求。在電容式傳感器中，常用電容檢測電路是將其轉換為電壓、電流或者頻率信號。目前的微型電容傳感器的極板面積變得越來越小，電容總量只有幾個pf ，變化量就更小。
  3. As a new generation of micro - satellite based on micro - electro - mechanic system ( mems ), pico - satellite, in virtue of its low weight ( 1kg or lighter ), is unburdened from high - cost large sending sets. thereby research of pico - satellite can be progressed with much lower cost without huge experimental establishments and wide - span workshops so that institutions, mostly universities, became the main researching force. besides reduced expenses, another advantage of research in university laboratories is the potential high privacy

    皮型衛星是新一代以mems技術為核心的微小衛星，由於質量很輕（ 1kg以下） ，可不使用高成本的大型運載工具進行發射，其成本可比一般衛星大大降低；此外，皮型衛星的研製將不再需要大型的實驗設施和高跨度廠房，因此目前大學等研究機構是研製皮型衛星的主要科研力量，在大學的實驗室里研製皮型衛星，可以降低它們的研製費用。
  4. Apropos of micromanufacturing technologies of silicon - based mems correlative to tini sma, patterning of tini thin film is one of the key processes, in order to photoetch thicker tini films ( more than 10

    同時， pt掩膜在hfno3 ho腐蝕系統中具有抗腐蝕力強、不脫落的特點，是腐蝕較厚tei膜（ 5nm ）的理想掩膜材料。
  5. And much of the buzz about micro devices has shifted to nanotechnology, an endeavor that makes mems researchers look like hardnosed pragmatists

    許多關于微型裝置的熱門遠景，現在已轉移到奈米科技，讓mems的研究人員反而像是冷靜的實用主義者。
  6. In such background, this thesis hope to develop and designs a series of applying in the military, the automobile and other domains test systems by researching the dsp and the mems inertial sensor, . this thesis mainly include following facets : the thsis designed a new type of four central suspension beams structure hardware electric circuit with the reference of adxl203 and carried on the electric circuit simulation

    在這樣的背景下，本論文課題希望通過對dsp和mems慣性傳感器的研究，研製和設計出一系列能夠應用於軍事，汽車或者其他領域的測試系統。主要進行了以下工作:設計了一種全新的四梁中心懸臂結構加速度傳感器的硬體電路，並進行了電路的模擬。
  7. An automatic flip chip bonder is a precision instrument used to align and bond one or more dies onto a substrate in semiconductor industry. it develops for the mass production of ic, mems and moems with small feature sizes and high precise bonding demands. an alignment system is one of the key components in flip chip bonders

    全自動倒裝貼片機（ flipchipbonder ）是半導體生產工藝中完成晶元和基底對準、鍵合的高精度自動化設備，適合於特徵尺寸小，鍵合精度要求高的ic （ integratedcircuit ） 、 mems （ microelectromechanicalsystem ） 、 moems （ microopticalelectromechanicalsystems ）等的大規模生產。
  8. To construct and analysis the ttd demo module, the mems devices substitute for the former electric devices, then succeed to obtain the rf mems front - end r / t system which can communicate with each other

    最後，用mems器件代替傳統電子器件，成功建立1 . 88ghzpcb級rfmems前端收/發模塊，達到了合理的發射功率和接收靈敏度，成功收發信號。
  9. In a general way, the sensitive performance of gas sensor is closely relative to the working temperature. it is very easy for mems to integrate the gas sensitive element, the heater and temperature sensor together

    氣體傳感器的敏感性能一般與工作溫度密切相關， mems技術很容易將氣敏元件和加熱元件、溫度探測元件製作在一起，保證了氣體傳感器的優良性能。
  10. We call this measure as “ global - coarse and local - precise orientation ”, with which full - automation bonding is realized. first a micro vision positioning system based on zoom microscope is established after analysis of mems parts ’ property and bonding requirement, which gets both big visual range and high resolution

    首先，本文在分析了mems器件的特點及鍵合要求后，建立了基於連續變倍顯微物鏡的顯微視覺定位系統，成功解決了大視野、高精度顯微視覺定位的關鍵技術。
  11. Micro - electromechanical systems ( mems ) are micron - scale sensing and / or actuation devices integrated on a chip. with the development of microelectronic mechanical system, it is found wide application in industries and national defense

    隨著微電子機械繫統（ microelectronicmechanicalsystem ， mems ）技術的興起和發展， mems器件已大量應用於國防和民用產品。
  12. Micromanipulation is an important emergency technology developed mainly over the past decade. the micro / nano manipulation systems have been widely applied to mems manufacturing, optical parts alignment, optical fiber connection, laser navigation, biomedical engineering and ic manufacturing

    在過去的十年中，微操作技術得到了飛速的發展，微操作系統在mems製造、光學調整、光纖作業、激光制導、生物醫療、 ic製造等領域得到了廣泛的應用。
  13. The electrophoretic microchip fabricated by mems technology is successfully used to finish the electrophoresis process

    摘要微晶元電泳是基於微機電加工技木（ mems ）工藝，在晶元上的微管道中完成電泳檢測過程的新型技術。
  14. Composition and electromagnetic property of elctrofomed ni - fe alloys for mems

    微機電系統用電鑄鎳鐵合金的制備及其電磁性能
  15. Mems technology is a hot topic of science and industry in the 21st century, and micro - fabrication technologies are the key to the mems development. in the mems field, microstructure with high height and high aspect ratio is often used. liga ( x - ray lithography 、 electroforming 、 micro - replication ) technology are the very way to fabricate this microstructures

    在mems領域中，常需要用到具有一定厚度和深寬比的微結構， liga （ x射線深層光刻、電鑄成型和微復制）技術是製作這種微結構的重要手段，因此成為mems微細加工中十分重要的技術。
  16. Fabricating the nanoporous silicon membrane with nanotechnology and bio - mems technology, the thickness of membrane, pore size and distribution, geometry shape and porosity can precisely controlled

    摘要採用納米技術和生物微電子機械繫統技術制備納米多孔硅膜，可準確控制膜的厚度、幾何形狀、孔大小、孔分佈和孔隙率。
  17. Mems optical switch for optical communication is fabrication by silicon surface micromachining technology. surface micromachining technique, based on the standard cmos processes, in the other hand, offers greater flexibility for realizing free - space optical systems on a single chip

    Mems光開關是採用表面微細機械加工技術製作而成，硅表面微機械加工技術是以cmos集成電路工藝為基礎的，它可以靈活地把光開關集成在一塊矽片上。
  18. Mems characterized by microform dimension and micromanipulation scope, along with the development of micro technology, becomes a high & new - technology for exploring and rebuilding the world from microstructure

    隨著微技術（ microtechnology ）的不斷發展，以形狀尺寸微小、操作尺寸極小為特徵的微機械已經成為人們從微觀角度認識和改造客觀世界的一種高新技術。
  19. Short - time drift characteristic of mems gyroscope

    實時小波濾波方法在硅微陀螺儀中的應用研究
  20. The platform can also be used in other fields, such as mems, super precise process

    宏微控制平臺還可以應用於其他領域，比如說mems 、超精密加工等。
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