nanoscope 中文意思是什麼
nanoscope
解釋
毫微秒超高頻示波器-
There are two parts in the paper, the first is about the principles of opc, lithography simulation algorithms, opc implementation and based on nanoscope, a verification tool, some verification to corrected designs are implemented
本文主要包括兩部分,第一部分主要介紹了光學鄰近校正的原理,光刻模擬演算法和光學鄰近校正的實現,並且基於軟體nanoscope對一些進行過光學鄰近校正處理的設計進行可製造性檢查,並對結果進行總結。
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