proximity function 中文意思是什麼
proximity function
解釋
迫近函數-
Abstract : a new method for determining proximity parameters, and in electron - beam lithography is introduced on the assumption that the point exposure spread function is composed of two gaussians. a single line is used as test pattern to determine proximity effect parameters and the normalization approach is adopted in experimental data transaction in order to eliminate the need of measuring exposure clearing dose of the resist. furthermore, the parameters acquired by this method are successfully used for proximity effect correction in electron - beam lithography on the same experimental conditions
文摘:在電子散射能量沉積為雙高斯分佈的前提下，提出了一種提取電子束光刻中電子散射參數，和的新方法.該方法使用單線條作為測試圖形.為了避免測定光刻膠的顯影閾值，在實驗數據處理中使用歸一化方法.此外，用此方法提取的電子散射參數被成功地用於相同實驗條件下的電子束臨近效應校正 -
On the basis of analyzing multi - agent technology thoroughly, this paper establishes a mapping of work piece and manufacturing equipments to a series of agents, and builds up four dynamic models of manufacturing system : domain based hierarchical structure, topology of cascading agent structure, proximity relation structure and bus - based network structure. this paper also illuminates the function of agents in these models and the mechanism of these models
本論文在分析代理技術的基礎上，把工件和製造設備等映射為一個個的代理，建立了四種機械製造系統的動態模型：地域遞階結構模型、面向對象結構模型、臨近關系結構模型和總線結構模型，並詳細介紹了模型中各個代理的功能以及系統的運行機制。
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