salicide 中文意思是什麼
salicide
解釋
自對準多晶硅化物-
The heat - reaction characteristics of ni / si and tin / ni / si structure and the regularity for forming the nisi film have been studied deeply and formed the excellent ni - salicide shallow junction diode
文中對ni si和tin ni si的熱反應特性以及nisi薄膜的形成規律進行了詳細的研究。制備了優質的ni硅化物淺結二極體。 -
We analyzed the mechanism of the reverse leakage current for ni - salicide shallow junction and studied the effect of the different process condition on the reverse leakage current
分析了ni - salicide淺結反向漏電流產生的機理,研究了不同的工藝條件對淺結反向漏電流的影響。 -
In this paper, ni - salicide process has been investigated intensively for the application to deep sub - micron coms devices. with the size of devices scaling, ni - salicide is more suitable for cmos devices than ti - salicide or co - salicide by improving salicide process
隨著器件尺寸的進一步縮減,與傳統的ti 、 co自對準硅化物相比, ni自對準硅化物更能適用於cmos器件對硅化物的要求。
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