smooth waveguide 中文意思是什麼
smooth waveguide
解釋
均勻波導-
For the first time, an integrated waveguide turning mirror ( 1wtm ) in soi was put forward and realized. using anisotropic etching technology with koh solution, the mirror surface was very smooth with root square roughness only 5. 19nm, and the mirror was vertical to the wafer surface because of the crystalline relationship
論文首次設計並製作了soi上集成波導式轉彎微鏡（ iwtm ） ，利用硅的koh各向異性腐蝕特性製作出的微鏡表面非常光亮，均方根粗糙僅為5 . 19nm ，並且由於鏡面是腐蝕出的晶面，其與晶片表面非常垂直。
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