surface vacancy 中文意思是什麼
surface vacancy
解釋
表面空位-
Ln this new model, each er atom replaces a si dimer on the top layet, and every two adjacent er atoms form a pairlike smicture, with a surface vacancy being illtroduced among two adjacent er dimers
該模型中，每個鉺原子替代了一對硅二聚物，且每兩個相鄰的鉺原子形成配對的二聚物結構。同時每兩個相鄰的鉺二聚物間存在著表面空位。 -
By examining the vacancy formation energy of three kinds of defect sno _ 2 ( 110 ) surface, the most energetically favorable defect surface is that the surface possesses the coexistence of bridging and in - plane oxygen vacancies, which is different with the traditional defect model by only removing bridging oxygen
通過考察形成三種不同類型sno _ 2 （ 110 ）缺陷表面的缺陷形成能，結果表明，形成同時具有橋氧和面氧缺陷的構型能量上最為有利，這與通常所認為的橋氧缺陷最為穩定不同。 -
With the development of vlsi ( very large scale integration ) and ulsi ( ultra large scale integration ), rtp ( rapid thermal process ), which consumes less time and less energy than classical thermal treatments, have been widely employed in semiconductor manufacturing. however, the most importance is that rtp is applied for defects engineering of silicon material. it is generally believed the rtf leads to the injection of additional vacancies into silicon wafer, and then a so - called magic denuded zone ( mdz ) in the near - surface region of cz silicon wafer was formed by controlling the vacancy distribution
隨著大規模集成電路（ vlsi ）和超大規模集成電路的發展，節省時間、節省能量、容易控制的快速熱退火工藝在半導體器件製造工藝中得到了廣泛的應用，並且在硅材料的缺陷工程中發揮了特殊的作用，人們通過高溫快速熱處理在矽片中引入空位，並控制空位的分佈，進而形成了具有較強內吸雜能力的潔凈區。
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