wafer lithography 中文意思是什麼

wafer lithography 解釋
晶片光刻
  • wafer : n 1 薄脆餅;薄餅一樣的東西;【物、無】圓片;薄片;晶片;【醫學】糯米紙〈包藥用的干糊片〉。2 (封...
  • lithography : n. 石印〈平版印刷〉術;平版印刷品。
  1. Wafer stepper lithography

    薄片的步進式光刻
  2. The processes include the deposition of the waveguide film, the design and fabrication of the mask pattern, the lithography, the metal coating with a magnetic sputtering, the lift - off process for the metal mask, the dry deep etching by icp, the slicing of the wafer, the polishing of the cutting edge, the fiber - to - waveguide alignment and at last, the performance testing. some edg chip samples are fabricated

    對設計好的集成波導器件,本論文設計並試驗了器件的製作的全部工藝,包括波導薄膜的沉積,掩模的設計製作,光刻,濺射金屬薄膜,剝離法製作金屬掩模,干法深刻蝕,矽片切割,端面磨拋,波導對準和性能測試。
  3. Lithography, as used in the manufacture of ics, is the process of transferring geometic shapes on a mask to the surface of a silicon wafer.

    光刻技術應用到集成電路製造中,就是將掩模版的幾何圖形轉移到矽片表面的工藝過程。
  4. The most prevalent procedure is to use photolithography or electron - beam lithography to produce a pattern in a layer of photoresist on the surface of a silicon wafer

    最常用的步驟是用光蝕刻或電子束蝕刻法,在矽晶圓表面的光阻層上製作出圖案。
  5. The wafer processing system is an important subsystem of the lithography, which consists of a wafer transmission system and a wafer pre - alignment system

    晶圓處理系統是光刻機的重要組成子系統,其包含兩個主要部分:晶圓傳輸系統和晶圓預對準系統。
  6. Silicon grating is a period construction fabricated on the silicon wafer by micro fabrication techniques as ultraviolet lithography and anisotropic etching

    硅光柵是利用紫外光刻、各向異性腐蝕等硅微加工技術在矽片上製作的周期結構。
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