water-vapor plasma 中文意思是什麼

water-vapor plasma 解釋
水蒸汽等離子體
  • water : n 1 水;雨水;露;〈常作 pl 〉 礦泉,溫泉;藥水。2 〈常 pl 〉水體;水域;水道;海;湖;河;海域;...
  • vapor : n. 〈美國〉= vapour.
  • plasma : n. 1. 【生理】血漿;淋巴液。2. 【生物學】原生質。3. (做藥膏用的)膏漿。4. 【礦物】半透明的綠玉髓。5. 【物理學】等離子(體);等離子區。
  1. In the present work, water plasma ion implantation, instead of the conventional oxygen plasma ion implantation, has been employed to fabricate soi materials. the masses of the three dominant ion species in the water vapor plasma, h2o +, ho +, and o +, are very close to each other, which overcome the problem of co - existence of o and 02 in oxygen plasma source. the oxygen depth profiles in the water plasma ion as - implanted silicon do not disperse much, which makes it possible for the formation of single buried oxide ( box ) layer by choosing appropriate implantation energy and dose

    本論文創造性地採用水等離子體離子注入方式代替傳統的氧離子注入方式來制備soi結構材料,由於水等離子體中的三種離子h _ 2o ~ + 、 ho ~ +和o ~ +質量數相差很小,克服了氧等離子體中因o _ 2 ~ +和o ~ +質量數相差大而引起的氧在硅中的分佈彌散,使注入硅后的氧射程分佈相對集中,比較容易退火后形成soi結構材料。
  2. By the design of microwave electric field mode and microwave mode converter ( mmc ), the thesis participated in equipping an domestic microwave plasma chemical vapor deposition ( mpcvd ) equipment with a quartz glass window and water - cooled stainless steel resonant chamber in 2450mhz / 5 kw, introduced the basic machineries and functions of the sub - systems, including microwave system, gas - route system, vacuum system, detecting system and safeguard system

    論文通過微波場型和模式轉換器的設計,參與建立了一套2 . 45ghz 5kw帶有石英玻璃窗、水冷卻不銹鋼諧振腔的微波等離子體化學氣相沉積( mpcvd )系統( mpcvd - 4型) 。論述了包括微波系統、氣路系統、真空系統、檢測系統和保障系統等結構的組成及基本功能。
  3. The research introduced a domestic microwave plasma chemical vapor deposition ( mpcvd ) equipment with a quartz glass window and water - cooled stainless steel reaction chamber in 2450mhz / 5 kw

    本文詳細介紹了自行研製的2450mhz 5kw帶有石英玻璃窗、水冷卻不銹鋼腔體微波等離子體化學氣相沉積( mpcvd )裝置。
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