xecl 中文意思是什麼
xecl
解釋
氙氯-
The xecl excimer laser have broad applications in industry manufacture, scientific research, biomedical engineering, nuclear fusion, photoelectron, semiconductor etc. today, the excimer laser has been used in the serial of haloid excimer laser mainly, such as xecl, krf, xef, arf excimer laser
準分子激光在工業製造、科學研究、生物醫學、核聚變、光電子、半導體等重要的課題研究領域上有廣闊的發展遠景。特別是準分子激光在光電材料、光電技術上有得天獨厚的優良性能。 -
Due to great advantage of the excimer laser in photoelectron material, photoelectron technology research, so in this thesis, a xecl excimer laser is designed in order to solve some problem in semiconductor film, cmr film, quartz film and other kind of film application, optical etching field, interaction between laser and material, material plasma study. the parameters of the excimer laser is e also measured and analyzed
因此本文以氣相沉積、外延生長、巨磁薄膜、金剛石及其它薄膜制備及后續的光刻，激光與物質的相互作用，等離子體研究為目的，研製獲得了激光脈寬18ns ，單脈沖能量150mj ，矩形光斑大小2cm 1cm ，束散角3mrad ，最高重復頻率5hz的xecl準分子激光器。 -
At last we measure parameters of new excimer laser, the experimental measuring results show that our xecl excimer laser has better characters, and its output is excellent compared to others
最後論文對試製成功的準分子激光器參數進行了測試。試驗結果表明激光特性良好，與同類相比，準分子激光裝置激光輸出情況良好。
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