掩膜加工 的英文怎麼說
中文拼音 [yǎnmójiāgōng]
掩膜加工
英文
mask tooling-
The main contents and contributions include : ( 1 ) it has been proposed to uniform the temperature distribution through space modulating the intensity incident on the surface of substrate using a mask the emphasis of this method is to find the laser intensity distribution that can realize the temperature uniformity. the results show that when the mean temperature rise in the processed area is 500 k, the maximum temperature difference is 3. 5 k, which can meet the accurancy requirement of temperature uniformity
計算結果表明，採用四環帶結構的掩膜板對入射光進行調制，在0 . 2倍光斑半徑區域內平均溫升達到500k時，最大溫差只有3 . 5k （ 0 . 4倍半徑處僅有4 . 5k左右） ，可以在激光微細加工區域得到比較滿意的溫度分佈。Extreme ultraviolet lithography is being developed as one of the most important candidates to fabricate a sub - o. lum - pattern. in recent years, several key technologies have been developed rapidly such as laser producing plasma source, extreme ultraviolet multilayer, optical fabrication and metrology, projection - camara alignment, low - defect mask and control technology of stage
極紫外投影光刻（ extremeultravioletlithography簡稱euvl ）最有可能成為下一世紀生產線寬小於0 . 1 m集成電路的技術，近年來在激光等離子體光源、極紫外多層膜、光學加工和檢測、光學精密裝調、低缺陷掩模、光刻膠技術以及高穩定工作臺系統控制等關鍵技術方面得到了飛速發展。The work mainly consists of four parts : the first part is to use oxidation and lpcvd technique to produce sio2 mask film and si3n4 insulation film in order to enhance the heating efficiency of micro chamber, and guarantee the carry out of the reaction. the second part is to use the combination of dry etching and wet etching to produce reaction micro chamber, it is the container which carry out the pcr reaction, and dna sample carry out amplification reaction here. the third part is to use the sputtering, photolithography to produce heaters and temperature sensors which heat the reaction micro chamber and provide the temperature condition for the pcr reaction
首先，利用氧化工藝和lpcvd技術，生長sio _ 2掩膜層和si _ 3n _ 4絕緣層，以提高反應腔的熱效率，保證擴增反應的順利進行；其次，用濕法腐蝕和干法刻蝕相結合的方法加工微型腔體，使之作為dna樣品進行pcr擴增反應的容器；第三，用濺射、光刻等工藝在微型腔體底部製作微型加熱器和溫度傳感器，實現對反應腔體的加熱及其溫度的精確測量，提供pcr擴增反應所需的溫度條件。
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