極小型探測儀 的英文怎麼說
中文拼音 [jíxiǎoxíngtàncèyí]
極小型探測儀
英文
miniprober- 極 : i 名詞1 （頂點; 盡頭） the utmost point; extreme 2 （地球的南北兩端; 磁體的兩端; 電源或電器上電流...
- 小 : Ⅰ形容詞1 （體積、面積、數量、強度等不大） small; little; petty; minor 2 （年紀小的; 年幼的） youn...
- 探 : Ⅰ動詞1 （試圖發現） try to find out; explore; sound 2 （看望） call on; visit; see 3 （向前伸出）...
- 測 : 動詞1. （測量） survey; fathom; measure 2. （測度; 推測） conjecture; infer
- 儀 : 名詞1 （人的外表） appearance; bearing 2 （禮節; 儀式） ceremony; rite 3 （禮物）present; gift 4 ...
- 探測 : survey; search; sound; probe; sounding; detection; acquisition; reconnaissance; localization; fin...
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In order to facilitate the advancement of micro - fabrication and micromachine technologies, development of measurement methods for both profile and dimension of micro - components are essential. one of the methods available for this is a small three - dimensional profile measurement apparatus with micro - probes. for such an apparatus, the probes must be fabricated with optimal shape for individual part measurement. in this research, micro - electrical discharge machining ( micro - edm ) which has extremely small machining force and is applicable for fabrication of various types of probes, is used for probe manufacturing. various types of probes which are installed to the small three dimensional profile measuring apparatus based on principle of scanning tunneling microscopy ( stm ) are fabricated by the proposed method. the probes fabricated have been successfully used for the measurement of several micro - parts and the results show the effectiveness of the proposed method
為了推動微加工和微機械技術的進步，微型零件輪廓和尺度測量方法的發展非常重要.可行方法之一就是使用帶微探頭的小型三維輪廓測量儀.這種儀器的探頭必須針對某個零件的測量，按照最佳外形製造.微放電加工有著極小加工力，可用於各種探頭的製造，本研究中用它進行探頭加工.用這種方法製造了多種探頭，將其裝在基於掃瞄隧道顯微技術（ stm ）的小型三維輪廓測量儀上.所製造的探頭已被成功地用於各種微元件測量，結果表明此方法可行
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