硅單晶拋光片 的英文怎麼說
中文拼音 [guīdānjīngpāoguāngpiān]
硅單晶拋光片
英文
monocrystalline silicon polished wafers-
Monocrystalline silicon polished wafers
硅單晶拋光片The demand of the wafer ' s quality become higher too. the result of the final polishing determines the quality of silicon substrate for the final polishing is the last step in the polishing. in this paper, the mechanism and dynamics process of silicon polishing are systematically analyzed
隨著集成電路向著甚大規模集成電路( ulsi )日新月異的發展,作為襯底材料的硅單晶片的尺寸越來越大,特徵尺寸也不斷減小,對硅襯底拋光片的拋光質量的要求也越來越高。
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