精密光刻 的英文怎麼說
中文拼音 [jīngmìguāngkè]
精密光刻
英文
precision photolithography-
Referencing the existing laser lithography tools and according the structure principle of maglev - bearing and maglev - vehicle, two structure patterns of precision stage based on maglev technology and driven non - contactly by linear motor are designed and researched. the two maglev precision stages will be of freedom information property and adapt to develop and manufacture laser lithography tools by ourselves
在參考國內外光刻機現有定位平臺結構形式的基礎上，根據磁懸浮軸承和列車的結構原理，以磁懸浮技術為基礎、以直線電機無接觸驅動為動力，研究並設計了具有自主知識產權的兩種結構模式磁懸浮精密定位平臺，以適應我國自主研製開發新一代光刻機的需要。The company has cad design centre, precision etching and developing production line, chemical cleaning production line, scrubbing production line, high - power exposing machine, cnc drilling machine, suctioning silk screen machine, speedy press, vacuum multilayer press, chemistry sink copper and metal surface treating production line, punches, etc. import or domestic advanced equipment
公司擁有cad設計中心，精密蝕刻、顯影生產線，化學清洗生產線，磨板生產線，大功率曝光機，數控鉆床，吸氣絲印機，快壓機，真空層壓機，化學沉銅及金屬表面處理生產線，沖床等進口或國產先進設備。Not only the uniformity of laser energy on the target surface, but also the high uniformity of laser intensity at any time is needed for icf ( inertial confinement fusion ), so power balance is the important stage of the precision upgraded modification to multi - beams high power laser driver
慣性約束核聚變不僅對輻照靶面的激光能量均衡性而且對任意時刻的功率均衡性都有很高的要求，因此功率平衡是多路激光驅動器精密化升級改造的重要環節。Extreme ultraviolet lithography is being developed as one of the most important candidates to fabricate a sub - o. lum - pattern. in recent years, several key technologies have been developed rapidly such as laser producing plasma source, extreme ultraviolet multilayer, optical fabrication and metrology, projection - camara alignment, low - defect mask and control technology of stage
極紫外投影光刻（ extremeultravioletlithography簡稱euvl ）最有可能成為下一世紀生產線寬小於0 . 1 m集成電路的技術，近年來在激光等離子體光源、極紫外多層膜、光學加工和檢測、光學精密裝調、低缺陷掩模、光刻膠技術以及高穩定工作臺系統控制等關鍵技術方面得到了飛速發展。Guangzhou hongrui chem - etch company ltd., located guangzhou, near guangzhou baiyun international airport, is an up - and - coming facility in china providing precision photo - etched metal components to a vast array of market
廣州洪瑞五金製品有限公司是一家以特種精密光化學蝕刻加工為主營業務的高科技公司。公司毗鄰美麗的廣州新白雲機場，座落於新機場高速太成出口和106國道附近，交通與物流運輸快捷、便利，滿足現代製造業對市場快速響應的需求。Guangzhou yitaiqi chem - etch company ltd., located guangzhou, near guangzhou baiyun international airport, is an up - and - coming facility in china providing precision photo - etched metal components to a vast array of market
廣州伊泰奇精密五金有限公司是一家以特種精密光化學蝕刻加工為主營業務的高科技公司。公司毗鄰美麗的廣州新白雲機場，座落於新機場高速太成出口和106國道附近，交通與物流運輸快捷、便利，滿足現代製造業對市場快速響應的需求。For some reasons such as mechanic fault and miss operation, the expensive measure stitches and fine laser trim table can be broken. in order to resolve this problem, this paper discuss reliability design, with which the laser trim table system can realized dynamic fault diagnose and self - protect, and it protect the optical system, laser trim table and measure stitches
為了避免由於機械故障或人為誤操作等原因，對昂貴的測量探針組以及光刻平臺等精密運動器件造成損壞，對光刻平臺系統進行了可靠性設計，使其具有了動態故障自診斷和自保護功能，保護了光學系統、光刻平臺和測量精密探針組的安全。The structure and basic theory of the electrical control system of the precision workbench. it is applied in quasi - molecular laser photolithographic technology
本文論述了精密工作臺電控系統的結構及工作原理，它主要應用於準分子激光光刻技術中。With the development of micro - electronics and information processing, microelectronic devices with high density, high velocity and superfrequency have been get rid of the stale and brought forth the fresh, which vastly prompt the development of the micro fabrication technologies to the field of the hyperfine, and put forward the higher requirement for the resolution of the conventional photo 1 i tho graphy
隨著微電子和信息技術的飛速發展，高密度、高速度、超高頻微電子器件不斷推陳出新，促使微細加工技術不斷向著超精細領域發展，對傳統光學光刻技術的分辨本領提出更高的要求。傳統光學光刻中提高解析度往往是以犧牲系統焦深為代價的。In this paper, the development trend of micro - electronics equipment, the progress situation of precision work stage for laser photolithography equipment and the research and evolution of magnetic levitation technology in china and other countries are discussed generally. the main function, the demand of technical index and key technology of laser photolithography work stage are introduced simply. the magnetic levitation technology and the work principle of linear motor are stated, and the design and analysis method of mechatronics cad / cae for magnetic levitation precision stage is presented
本文綜述了微電子製造設備發展趨勢及其精密工作臺如光刻機工作臺的國內外發展現狀及磁懸浮技術研究進展，簡要介紹了光刻機工作臺主要功能、技術指標要求、組成及關鍵技術，概述了磁懸浮技術及直線電機驅動的工作原理，著重研究用機電一體化cad cae集成技術設計、分析磁懸浮精密定位工作臺的方法，闡明了應用cad cae技術研製磁懸浮精密定位工作臺的現實意義。Laser carving and laser rotary carving are widely applicable in fast precision marking of engine jets, sparking plugs, sensors, instrumental panels, music panels, brake linings, etc
激光標刻及激光旋轉標刻廣泛適用於發動機油嘴、火花塞、傳感器、儀表盤面板、音響面板、剎車瓦等精密快速打標。The development status and trend of micro - electronics in china and others countries and the important influence of micro - electronics in the increase of world economy are discussed generally in this paper, and the research and development of laser lithography technology and equipment are summarized. the realistic significance, importance and feasibility of researching a new style of magnetic levitation ( maglev ) precision stage are narrated
論文系統地綜述了國內外微電子技術的發展概況、發展趨勢以及微電子產業在世界經濟增長中具有的重大影響，概述了光刻技術和光刻設備的研究與發展狀況，敘述了當前磁懸浮技術的研究及應用水平，闡明了研製新型磁懸浮精密定位平臺的現實意義、重要性和可行性。Combining magnetic levitation technology and linear motor drive technology, applying cad / cae method, a new magnetic levitation precise stage is designed and researched, which is step and precise position mechanism in 1c chip manufacture equipment of micro - electronics trade such as laser photolithography equipment. it is an innovative research
將磁懸浮技術和直線驅動技術相結合，採用cad cae技術手段設計研究了一種新型磁懸浮精密定位工作臺，它是針對微電子行業ic晶元製造設備如光刻機而研製的快速步進、精密定位機構，是創新性研究。分享友人