膜片剛度 的英文怎麼說
中文拼音 [mópiāngāngdù]
膜片剛度
英文
mambrane tension-
The unbalance responses of the rotor - bearing system with a flexible laminated membrane coupling were investigated, in which the effects of the stiffness of the coupling and the misalignment of the rotors were mainly taken into account, respectively
研究了膜片聯軸器耦合的轉子?軸承系統的不平衡響應,重點分析了膜片聯軸器的剛度和轉子的不對中量對系統不平衡響應的影響。The dynamic equation for analyzing torsional vibration of the vehicle drivetrain is established based on analyzing the jointing process of frictional clutches, and the inherent frequency, the response of torsional vibration and the sensitivity of rigidity parameters to inherent frequency are studied
摘要文章在分析車輛最常用的膜片彈簧摩擦離合器接合過程的基礎上,建立汽車傳動系的扭轉振動的力學分析方程;結合實際車型,分析了車輛的固有頻率、扭振響應、剛度參數對固有頻率的靈敏度。The result shows that argon gas can not only promote the excitation of plasma at low pressure, but also improve discharge state, increase the density and activation of reaction radical and improve the quality of diamond films. on the other side, argon can cool the plasma and maintain low temperature of substrate due to its big ionization section and high collision probability with gas molecules
結果表明,氣體系統中引入氬氣一方面不僅有利於維持低壓放電,而且改善放電狀態,提高反應活性基濃度和活性,提高低溫沉積金剛石膜的質量;另一方面,由於其大的電離截面使其和電子碰撞的幾率大大提高,對等離子體進行冷卻,有利於基片溫度的降低。Using the microwave selective heating property for materials, by setup equivalent equation, and first time inducing the electromagnetic field perturbation theory to the design of heating materials for substrate in mpcvd, three temperature distribution modes were established, including temperature distribution comprehensive mode of inhomogeneous plasma, temperature distribution composite mode of composite substrate materials, temperature distribution perturbation mode of composite materials, which ii provided an whole new technology route to the design of substrate heating system in mpcvd and guided the preparation of heating materials for substrate. and then the heating materials for substrate were designed and optimized to obtain large area homogeneous temperature distribution even larger than substrate holder ' s diameter. as an important part, this thesis researched the nucleation and growth of diamond films in mpcvd, systematically researched the effects of substrate pretreatment, methane concentration, deposition pressure and substrate temperature etc experimental technologic parameters on diamond films " quality on ( 100 ) single crystal silicon substrate in the process of mpcvd, characterized the films qualities in laser raman spectra ( raman ), x - ray diffraction ( xrd ), scanning electron microscopy ( sem ), infrared transmission spectra ( ir ), atomic force microscopy ( afm ), determined the optimum parameters for mpcvd high quality diamond in the mpcvd - 4 mode system
該系統可通過沉積參數的精確控制,以控制沉積過程,減少金剛石膜生長過程中的缺陷,並採用光纖光譜儀檢測分析等離子體的可見光光譜以監測微波等離體化學氣相沉積過程;利用微波對材料的選擇加熱特性,通過構造等效方程,並首次將電磁場攝動理論引入到mpcvd的基片加熱材料的設計中,建立了非均勻等離子體溫度場綜合模型、復合介質基片材料的復合溫度場模型及復合介質材料溫度場攝動模型,為mpcvd的基片加熱系統設計提供了一條全新的技術路線以指導基片加熱材料的制備,並對基片加熱材料進行了設計和優選,以獲取大面積均勻的溫度場區,甚至獲得大於基片臺尺寸的均勻溫度區;作為研究重點之一,開展了微波等離體化學氣相沉積金剛石的成核與生長研究,系統地研究了在( 100 )單晶硅基片上mpcvd沉積金剛石膜的實驗過程中,基片預處理、甲烷濃度、沉積氣壓、基體溫度等不同實驗工藝參數對金剛石薄膜質量的影響,分別用raman光譜、 x射線衍射( xrd ) 、掃描電鏡( sem ) 、紅外透射光譜( ir ) 、原子力顯微鏡( afm )對薄膜進行了表徵,確立了該系統上mpcvd金剛石膜的最佳的實驗工藝參數。分享友人