correction for centering 中文意思是什麼
correction for centering
解釋
歸心改正- correction : n 修正，改正；校正；矯正；〈古語〉懲罰；勘誤表，補正。 a copy disfigured by numerous corrections ...
- for : FOR f o r ＝ free on rail 【商業】火車上交貨（價格）。1 〈表示目標、去向〉向，往。 leave [sail] f...
- centering : n. 1. 定（中）心，定圓心，對中。2. 【建築】臨時穹頂支架，拱膺架（裝置）。
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Centering at soft x - ray multilayer uniformity technology, we introduce general situation of multilayer, design of multilayer structure, simulation calculation, ion - beam sputtering deposition and evaluation of samples. above all, we carry out study of improving uniformity of period thickness spatial distribution, and develop correction mask for controlling period thickness. as a result, we improve uniformity from 4. 5 % to 2. 0 %, the error of period thickness on ( 130nm field is controlled within 0. 18nm, and the reflectivity reach 35 % at center wavelength 17. 1nm
特別地，我們設計並應用膜厚擋板補償技術控制多層膜的膜厚分佈，將膜厚分佈非均勻性從4 . 5減小到2 ，周期厚度絕對差值控制在0 . 18nm以內，並且制備得實際多層膜樣品在中心波長17 . 1nm處實測反射率達到35 ，達到實用水平。
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