dark-field method 中文意思是什麼
dark-field method
解釋
暗視場研究法-
Based on generation and processing of phase conflict graph, a new method is presented to fully and accurately verify the phase compatibility of dark - field standard cell layouts, which are produced according to conventional design rules
摘要介紹了一套基於相位沖突圖的生成和處理的新方法,可以準確、全面地對由傳統方法設計的標準單元版圖(暗場)進行檢查。 -
The second is about verification of alternating psm manufacturability and this part introduces a new method based on standard cells to resolve the phase conflicts, including for dark field and for clear field. the method has the capabilities of verifying standard cell layout, locating features with phase conflicts and giving out suggestion for modification
第二部分針對由傳統方法設計出的版圖不能滿足交替移相掩模要求的問題,介紹了一種基於標準單元的交替移相掩模可製造性驗證與設計的演算法,包括針對暗場和亮場兩種不同環境版圖的演算法。
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