diamond target 中文意思是什麼
diamond target
解釋
菱形板-
In the hipib film deposition, high purity graphite was employed as target. relations between process parameters and the microstructure, as well as different physical properties of diamond - like carbon ( dlc ) film deposited by hipib ablated plasma were studied by adjusting the distance between target and substrate, which affects the intensity and ion energy of hipib ablated plasma, and the temperature of substrate in the film deposition processes. the mechanism of film deposition by hipib ablated plasma was explored also
在薄膜沉積方面,利用高純石墨作靶材,調整薄膜沉積過程中的靶基距(燒蝕等離子體密度、離子能量)和基片溫度,研究實驗工藝對hipib燒蝕等離子體方法制備的dlc薄膜的微觀結構和宏觀物理性能的影響,探討了hipib燒蝕等離子體沉積dlc薄膜的成膜機理。
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