electrostatic detection 中文意思是什麼
electrostatic detection
解釋
靜電偵檢- electrostatic : adj. 靜電的，靜電學的。adv. -cally
- detection : n. 1. 探知；發現，發覺；敗露。2. 【化學】檢定，檢查；【電訊】檢波。
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By means of the theoretical analysis of the micromachined vibratory rate gyroscope, we get following conclusions : the microgyroscope can be driven by tangent electrostatic force produced by fence structure electrodes, and the normal electrostatic force can be neglected for the influence of the device property ; the parasitical capacitance and fringing effect can ’ t be neglected for the calculating of the detection capacitance ; the coefficient of damping force is comparatively little when the air damping in the driving mode and the sensing mode of the device is the couette flow damping
主要內容如下: 1 .分析了微機械陀螺的運動特性、靜電驅動特性和在大氣下的阻尼特性，分析結果表明，可以運用切向靜電力驅動質量塊振動，法向靜電力對器件特性的影響可以忽略;在計算微結構電容時，電容的邊緣效應和寄生電容不可忽略;在器件所受阻尼主要為庫埃特流阻尼的情況下，阻尼力系數較小。
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