erosion rate-time pattern 中文意思是什麼
erosion rate-time pattern
解釋
磨蝕速率-時間圖-
Besides of those, the pattern of the target is novel after the long time ' s erosion. there is no erosion ring on its surface, so we can use this method to improve the utilization rate greatly
更重要的是:此時靶面被刻蝕的狀態比普通磁控濺射的要均勻得多,刻蝕深度值是從邊緣到中間逐漸增大的,在靶面並沒有出現通常的刻蝕環,因此這種磁控配置大大提高了靶的利用率。
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