erosion target 中文意思是什麼
erosion target
解釋
沖蝕靶-
For liquid xe aerosol spray target, important lpp characteristics, such as laser - to - euv conversion efficiency, euv radiation absorption, debris production by target material erosion or deposition, are studied in detail, a 13. 4nm conversion efficiency of 0. 75 % into 2 % bandwidth and 2 steradian emission solid angle is achieved at 0. 5mm laser - nozzle distance
在實驗上,建成了一套高光譜解析度和高靈敏度的軟x射線脈沖輻射測量裝置。測量了co _ 2 、 o _ 2 、 cf _ 4 、 kr和xe液體微滴噴射靶lpp光源在6 20nm波段的軟x射線輻射光譜。 -
The erosion failure and plug failure of target are the main character under this condition
靶材發生侵蝕破壞和沖塞型破壞。 -
Besides of those, the pattern of the target is novel after the long time ' s erosion. there is no erosion ring on its surface, so we can use this method to improve the utilization rate greatly
更重要的是:此時靶面被刻蝕的狀態比普通磁控濺射的要均勻得多,刻蝕深度值是從邊緣到中間逐漸增大的,在靶面並沒有出現通常的刻蝕環,因此這種磁控配置大大提高了靶的利用率。
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