euv laser 中文意思是什麼
euv laser
解釋
極遠紫外激光器-
For liquid xe aerosol spray target, important lpp characteristics, such as laser - to - euv conversion efficiency, euv radiation absorption, debris production by target material erosion or deposition, are studied in detail, a 13. 4nm conversion efficiency of 0. 75 % into 2 % bandwidth and 2 steradian emission solid angle is achieved at 0. 5mm laser - nozzle distance
在實驗上，建成了一套高光譜解析度和高靈敏度的軟x射線脈沖輻射測量裝置。測量了co _ 2 、 o _ 2 、 cf _ 4 、 kr和xe液體微滴噴射靶lpp光源在6 20nm波段的軟x射線輻射光譜。 -
With the furthermore development of ultra thin film technology, soft x - ray multilayer mirrors was applied in many fields, such as astronomy, microscope technology, euv lithogrphy, x - ray laser, icf diagnosis and so on
隨著軟x射線超薄膜制備技術的不斷發展，軟x射線多層膜反射鏡已在多個領域中投入研究與應用，如天文學、生物醫學顯微鏡、極紫外投影光刻技術、 x射線激光、高溫等離子體診斷等等。
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