fabrication holes 中文意思是什麼
-
This thesis work has researched the fabrication technics of photonic crystal defect waveguide with air - bridge structure and collecting waveguide ; suggested using uv - lithography and wet etching to fabricate traditional waveguide, after that, using eb - lithography and dry etching to fabricate photonic crystal holes, so can reduce the fabrication cost by a big range ; designed the moulding board, which can fabricate the air - bridge structure and is convenient for recognizing position in eb - lithography ; the structure consisted of traditional waveguides and etching grooves are fabricated on soi successfully, then an successful eb - lithography is realized on the structure, the defect waveguide collected with the traditional waveguide quite well ; used the etching grooves to do the sacrificial layer etching experiment, which grounded etching sacrificial layer by photonic crystal holes in next step
提出採用紫外光刻工藝製作傳統波導結構之後，通過電子束曝光和干法刻蝕製作光子晶體小孔的工藝方案，大幅度減低了製作成本；設計出可形成空氣橋結構、並且適用於電子束曝光位置識別的光刻模板，在soi材料上成功製作出帶有空氣橋刻蝕預留槽以及接續光波導的結構，在該結構上成功實現了光子晶體帶隙波導的電子束曝光，帶隙波導與接續光波導位置接續良好；最後利用預留槽進行了刻蝕犧牲層的實驗，為下一步利用光子晶體小孔刻蝕犧牲層形成空氣橋結構打下了基礎。 -
Coplanar waveguides ( cpw ' s ) offer several advantages over conventional microstrips, these include the simplification of the circuit fabrication process, ease of parallel and series insertion of both active and passive components ( without the need for via holes ), and high circuit density. therefore cpw ' s are widely used in microwave and millimeter - wave integrated circuits, optical and high temperature superconductor microwave devices
與常規的微帶傳輸線相比，共面波導具有容易製作，容易實現無源、有源器件在微波電路中的串聯和並聯（不需要在基片上穿孔） ，容易提高電路密度等優點，因此共面波導被廣泛應用於微波、毫米波、光學和高溫超導等集成電路中。
分享友人