hot-carrier test 中文意思是什麼
hot-carrier test
解釋
熱載子試驗-
The emphasis is about the metal line reliability, contact reliability, gate oxide integrity, and hot carrier injection in test. based on the test datum, the reliability of 1. 0 m process on single failure mechanisms is evaluated, and all the test structures are explained
測試內容上著重介紹了金屬化完整性測試、氧化層完整性測試、連接完整性測試和熱載流子注入測試,根據測試數據,對1 . 0 m工藝線單一失效機理的可靠性進行了評價,對不同測試結構的作用進行了說明。
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