in-situ etching 中文意思是什麼
in-situ etching
解釋
原地浸蝕-
Lin h, li l and zeng l., " in - situ end - point detection during ion - beam etching of multilayer dielectric gratings ", chin. opt. lett., 3 ( 2 ), 63 ( 2005 )
林華， "介質膜光柵:光刻膠掩模占寬比和離子束刻蝕槽深的監控" ，博士論文，導師:李立峰（ 2006 ） -
Lin h, li l and zeng l., " in - situ monitoring during ion - beam etching of multilayer dielectric gratings : simulation and experiment ", holography, diffractive optics, and applications ii, spie, 5636, 143 ( 2004 )
林華，李立峰，曾理江， "利用導波耦合角度實時控制光刻膠光柵掩模的占寬比" ，光學學報， 26 ， 767 ? 772 （ 2006 ） -
Surface ramam spectrpscopy for in situ investigating silicon etching process
前驅體法制備氮氧化硅納米線及其光學性能研究 -
To this end, we have performed in situ ellipsometry measurements while etching through homogeneous, comparatively thick sige films of a known ge content
為此，我們實施了對于刻蝕均勻的比較厚的已知鍺濃度的鍺硅薄膜的同步橢偏測量。
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