ion polishing 中文意思是什麼
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Besides improvement of traditional polishing process, float polishing, ion beam machining, elastic emission machining and other new methods of polishing have been used for preparing super smooth surface in the last decade
近年來，此項技術研究進展迅速，不僅改進了傳統的拋光技術，還出現了浮法拋光、離子束加工和彈性發射加工等新技術。 -
The gettering processes usually are estimated by gettering of au to nanocavity in silicon. in this paper, the characteristics of nanocavity gettering mechanism, diffusion and distributing of aurum and ion implantation in silicon were described. in this work, many bumps on the polishing surface of the silicon, after a he + impantation in and subsequently a hot - treatment, were observed using atomic force microscope ( afm )
我們注意到，在研究氫、氦離子注入誘生微孔的吸除作用時多以對金雜質的吸除效果來對吸除工藝進行評估，因此本文對微孔吸除機理、金在硅中的擴散和分佈以及半導體中離子注入的特點進行了描述。
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