kohler illumination 中文意思是什麼
kohler illumination
解釋
柯勒照明- kohler : 柯勒
- illumination : n. 1. 照明，光照；照（明）度；〈常用 pl. 〉 燈飾。2. 啟發，啟蒙。3. （手寫本的）彩飾。illuminative adj.
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Kohler illumination was used in proximity lithography, and a fly ' s eye lens was adopted to form multi - point source in order to uniform the light intensity on the mask plane
摘要接近式光刻中一般採用柯勒照明系統，並採用蠅眼透鏡形成多點光源均勻掩模面的光場分佈。
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