langmuir probe 中文意思是什麼
langmuir probe
解釋
蘭米爾測量儀-
Langmuir type probe
朗謬爾探針 -
We tested the ecr deposition system and plasma parameters with the help of langmuir probe and faraday cup
我們還介紹了bn薄膜的特性、應用和bn體系相關系的研究。 -
This paper mainly study on the technics of preparing nano - si3n4 and icpecvd. seeking for the proper parameter and technics, crystallization of nano - si3n4 powder with muffle furnace, probe the new effective way of improving the properties of nano - si3n4 powder the ion density in the reaction chamber was diagnosed by a langmuir probe. the rules were obtained under different air pressure, different radio frequency power and different position which the ion density changes about from 1010cm - 3 to 1010cm - 3 decreasing as the pressure increases and increasing as the power decreases
利用朗繆爾探針診斷了反應室內等離子體參數,得到不同位置、不同功率和不同氣壓下等離子體密度的變化規律,結果表明離子密度為10 ~ 8 10 ~ ( 10 ) cm ~ ( - 3 ) ,等離子體密度隨著功率的增大而增大,隨著氣壓的升高而減小,由於離子鞘層的存在,在一定條件下提供了局部等離子體密度穩定的區域。 -
In this thesis, we have mainly studied the characteristics of chf3, c6h6 and cf4 electron cyclotron resonance ( ecr ) plasma using langmuir probe and optical emission spectroscopy ( oes ). the relative concentration of different radicals in chf3 plasma and the effect of chf3 / c6h6 ratio on bond configuration of a - c : f films were discussed. it was showed that h, f, c2 were the main radicals among radicals of h, f, c2, ch and f2 in chf3 ecr plasma
重點研究了chf _ 3 、 cf _ 4和chf _ 3 c _ 6h _ 6放電等離子體中基團的分佈;分析了不同基團的相對密度隨宏觀放電條件(微波輸入功率、放電氣壓、源氣體流量比)的變化規律;探討了等離子體中各種基團的生成途徑;在不同源氣體流量比的條件下沉積了a - c : f薄膜並通過傅立葉變化紅外吸收光譜( ftir )的測量得到了薄膜中鍵結構的信息;分析了a - c : f薄膜的沉積速率及其鍵結構與等離子體空間基團分佈狀態之間的關聯。 -
In situ diagnosis of plasma environment for synthesizing diamond film was conducted by langmuir single probe and optical emission spectroscopy. the mechanism of diamond growth was investigated and the n - type diamond was deposited by glow plasma assisted chemical vapor deposition ( cvd )
本文通過langmuir單探針和光發射譜對合成金剛石薄膜的等離子體環境進行了原位診斷;初步探討了金剛石薄膜生長的動力學過程;並採用輝光等離子體輔助化學氣相沉積( cvd )技術制備得到了n型金剛石薄膜。 -
A reciprocationg langmuir probe system in front of the lh launcher and the measurements for local sol layer
低雜波天線前的快往復探針系統及其對刮削層的測量
分享友人