nanolithography 中文意思是什麼
nanolithography
解釋
毫微光刻-
All this has laid a strong foundation for selecting a subject of maskless afm nanolithography, i. e., field - induced oxidation of si semiconductor. in chapter two, a high - intensity current between a probe tip and a sample is discussed first. electrical intensity between them is simulated using matlab software after an electrical model is introduced, thus theoretically analyzing the effect of tip radii, tip - sample separation, radii at the sample, and biases on the morphology of field - induced oxidation
第二章首先討論了掃描探針與樣品之間的高密度電流，得出了電流密度與偏置電壓和探針?樣品間距密切相關，其關系不能以簡單的線性或指數函數來表述的結論；然後引進了掃描探針場致加工的電場模型，利用matlab模擬探針與樣品之間的電場強度，分析了掃描探針加工條件包括探針針尖曲率半徑、探針-樣品間距、樣品平面半徑以及偏置電壓等對場致氧化物幾何形態的影響。
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