optical phase correction 中文意思是什麼
optical phase correction
解釋
光相位校正- optical : adj 眼的；視覺的；視力的；幫助視力的；光學（上）的。 optical activity 【物理學】旋光性。 an optic...
- phase : n 1 形勢，局面，狀態；階級。2 方面，側面。3 【天文學】（月等的）變相，盈虧；【物、天】相，周相，...
- correction : n 修正，改正；校正；矯正；〈古語〉懲罰；勘誤表，補正。 a copy disfigured by numerous corrections ...
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And the correction of a step wavefront produced by a step phase plate is accomplished successfully. 6. according to the phase modulation characteristic of an lcslm, arbitrary complicated wavefronts were modeled. the result shows that lcslm can be use to test the wavefront sensors and controller if lcslm has wider dynamic range and perfect optical quality
六、通過利用液晶空間光調制器的位相調制特性，成功地模擬產生了任意畸變波前，指出若該器件有更大的位相調制動態范圍和均勻性，將有可能成為校驗波前傳感設備和波前畸變控制系統性能的有力工具。 -
Before more advanced lithography tool is produced, in order to use current tools to manufacture vdsm ic, reticle correction methods such as perturbing the shape ( via optical proximity correction ( opc ) ) or the phase ( via phase - shifting masks ( psm ) ) of transmitting aperture in the reticle are proposed by the industry
在波長更小的光刻系統出現前，為了能利用現有設備解決集成電路的可製造性問題，工業界提出了對掩模作預失真（光學鄰近校正）和在掩模上加相位轉移模（移相掩模）等的掩模校正方法。 -
For the coordination of the contradictory, the wavefront technique has been regarded as an effective method to improve the image quality in photolithography by optimizing the image of the mask. it includes : pupil filtering, phase shift mask, off - axis illumination, optical proximity correction, and so on
為了協調這種矛盾，利用波前工程來改善光刻圖形的質量以提高光刻解析度，已廣泛地應用於光學光刻中，如：瞳孔濾波、相移掩模、離軸照明、光學鄰近效應校正等。
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