phase-correction filtering 中文意思是什麼
phase-correction filtering
解釋
相位校正濾波- phase : n 1 形勢，局面，狀態；階級。2 方面，側面。3 【天文學】（月等的）變相，盈虧；【物、天】相，周相，...
- correction : n 修正，改正；校正；矯正；〈古語〉懲罰；勘誤表，補正。 a copy disfigured by numerous corrections ...
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For the coordination of the contradictory, the wavefront technique has been regarded as an effective method to improve the image quality in photolithography by optimizing the image of the mask. it includes : pupil filtering, phase shift mask, off - axis illumination, optical proximity correction, and so on
為了協調這種矛盾，利用波前工程來改善光刻圖形的質量以提高光刻解析度，已廣泛地應用於光學光刻中，如：瞳孔濾波、相移掩模、離軸照明、光學鄰近效應校正等。
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