preannealing 中文意思是什麼
preannealing
解釋
事先退火-
In this paper, the relationship of the thermal donor with point defects was investigated by injection of different concentration and distribution vacancy via 1250 ?, rtp preannealing in different gases ( n2 o2, ar ). the influence of rtf preannealing on generation at 450 ? and annihilation at 650 ? of thermal donors ( td ' s ) was not detected
本論文通過不同氣氛（ n _ 2 ， o _ 2 ， ar ） 1250 30s高溫rtp預處理在矽片中引入不同濃度和分佈的空位，進而用四探針和擴展電阻研究450不同時間熱施主的生成特性和650熱施主的消除特性，從而確定熱施主和點缺陷之間的關系。
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