resist patterning 中文意思是什麼
resist patterning
解釋
光致抗蝕圖形成- resist : vt 1 抵抗，反抗，抗拒，敵對，抵禦，阻止，擊退（敵人、侵略等）；妨礙，阻礙。2 忍耐（艱苦等）；抵制...
- patterning : 測試散彈彈著
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Developing the lithography process models to properly characterize critical dimension ( cd ) variations caused by proximity effects and distortions introduced by patterning tool, reticule, resist exposure, development and etching, they are beneficial to develop a yield - driven layout design tool, the engineers could use it to automate the tasks of advanced mask design, verification and inspection in deep sub - micron semiconductor manufacturing
建立準確描述由於掩模製造工藝、光刻膠曝光、顯影、蝕刻所引起的光學鄰近效應和畸變所導致的關鍵尺寸變化的光刻工藝模型，有助於開發由成品率驅動的版圖設計工具，自動地實現深亞微米下半導體製造中先進的掩模設計、驗證和檢查等任務。
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